Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
900
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC1
|
WaferB46
| 8
|
2023-01-01 03:06:01.387
|
901
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.056341
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
902
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
903
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.99076
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
904
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.000024
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
905
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 665.062691
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
906
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.82422
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
907
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.049839
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
908
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.05517
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
909
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.070509
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
910
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.111728
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
911
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.046094
|
RecipeC1
|
WaferB47
| 10
|
2023-01-01 03:08:01.463
|
912
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB47
| 7
|
2023-01-01 03:08:06.383
|
913
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.915039
|
RecipeC1
|
WaferB47
| 7
|
2023-01-01 03:08:06.383
|
914
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 38.847656
|
RecipeC1
|
WaferB47
| 7
|
2023-01-01 03:08:06.383
|
915
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.923828
|
RecipeC1
|
WaferB47
| 8
|
2023-01-01 03:08:07.383
|
916
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC1
|
WaferB47
| 8
|
2023-01-01 03:08:07.383
|
917
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC1
|
WaferB48
| 8
|
2023-01-01 03:09:07.700
|
918
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -1.318359
|
RecipeC1
|
WaferB48
| 8
|
2023-01-01 03:09:07.700
|
919
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
920
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.043212
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
921
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
922
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
923
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.998871
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
924
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.951311
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
925
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 674.013034
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
926
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.075001
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
927
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.049153
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
928
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
929
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.910643
|
RecipeC1
|
WaferB48
| 10
|
2023-01-01 03:10:08.388
|
930
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.931153
|
RecipeC1
|
WaferB48
| 7
|
2023-01-01 03:10:13.397
|
931
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC1
|
WaferB48
| 7
|
2023-01-01 03:10:13.397
|
932
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 114.521482
|
RecipeC1
|
WaferB48
| 7
|
2023-01-01 03:10:13.397
|
933
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC1
|
WaferB48
| 8
|
2023-01-01 03:10:15.407
|
934
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC1
|
WaferB48
| 8
|
2023-01-01 03:10:15.407
|
935
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC1
|
WaferB49
| 8
|
2023-01-01 03:11:13.385
|
936
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -1.318359
|
RecipeC1
|
WaferB49
| 8
|
2023-01-01 03:11:13.385
|
937
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.066016
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
938
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
939
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.999267
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
940
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.016296
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
941
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 662.827148
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
942
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
943
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.0895
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
944
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.049188
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
945
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.99352
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
946
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
947
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.044444
|
RecipeC1
|
WaferB49
| 10
|
2023-01-01 03:12:14.713
|
948
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB49
| 7
|
2023-01-01 03:12:19.673
|
949
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 41.660156
|
RecipeC1
|
WaferB49
| 7
|
2023-01-01 03:12:19.673
|
950
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.937012
|
RecipeC1
|
WaferB49
| 7
|
2023-01-01 03:12:19.673
|
951
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC1
|
WaferB49
| 8
|
2023-01-01 03:12:21.713
|
952
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC1
|
WaferB49
| 8
|
2023-01-01 03:12:21.713
|
953
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -1.318359
|
RecipeC1
|
WaferB50
| 9
|
2023-01-01 03:13:23.681
|
954
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.079101
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
955
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.982295
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
956
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
957
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
958
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.998751
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
959
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
960
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
961
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.06714
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
962
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 668.422613
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
963
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
964
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:14:24.678
|
965
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 111.445311
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:14:29.668
|
966
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:14:29.668
|
967
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.95459
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:14:29.668
|
968
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:14:31.668
|
969
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.004394
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:14:31.668
|
970
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.079902
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
971
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.049153
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
972
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
973
|
lotA2
|
MFC2Flow_STEP_MEAN
| 74.98938
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
974
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99635
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
975
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
976
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.066016
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
977
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.022623
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
978
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.910643
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
979
|
lotA2
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
980
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 666.520723
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:15:56.695
|
981
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 40.759278
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:16:01.676
|
982
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:16:01.676
|
983
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.987915
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:16:01.676
|
984
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:16:03.675
|
985
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:16:03.675
|
986
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99647
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
987
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.990656
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
988
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
989
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.049153
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
990
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 674.848711
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
991
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.99871
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
992
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
993
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.031249
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
994
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.070509
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
995
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
996
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:17:33.691
|
997
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 681.15234
|
RecipeC1
|
WaferB50
| 12
|
2023-01-01 03:17:34.681
|
998
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.931152
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:17:39.671
|
999
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 43.41797
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:17:39.671
|
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