Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,100
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.925293
|
RecipeC2
|
WaferB57
| 7
|
2023-01-01 03:35:12.671
|
1,101
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC2
|
WaferB57
| 7
|
2023-01-01 03:35:12.671
|
1,102
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.000732
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:14.671
|
1,103
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:14.671
|
1,104
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,105
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.038125
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,106
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.0425
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,107
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,108
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 670.638637
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,109
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992648
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,110
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.06838
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:10.667
|
1,111
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 57.919922
|
RecipeC2
|
WaferB58
| 7
|
2023-01-01 03:37:15.686
|
1,112
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC2
|
WaferB58
| 7
|
2023-01-01 03:37:15.686
|
1,113
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.915039
|
RecipeC2
|
WaferB58
| 7
|
2023-01-01 03:37:15.686
|
1,114
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:17.679
|
1,115
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.960449
|
RecipeC2
|
WaferB58
| 8
|
2023-01-01 03:37:17.679
|
1,116
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -1.318359
|
RecipeC2
|
WaferB59
| 1
|
2023-01-01 03:38:19.664
|
1,117
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.06508
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,118
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.041357
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,119
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,120
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 671.185879
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,121
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,122
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.024167
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,123
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.993615
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:14.672
|
1,124
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.938477
|
RecipeC2
|
WaferB59
| 7
|
2023-01-01 03:39:19.672
|
1,125
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.1225
|
RecipeC2
|
WaferB59
| 7
|
2023-01-01 03:39:19.672
|
1,126
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 52.734375
|
RecipeC2
|
WaferB59
| 7
|
2023-01-01 03:39:19.672
|
1,127
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:21.721
|
1,128
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB59
| 8
|
2023-01-01 03:39:21.721
|
1,129
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,130
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.038159
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,131
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 670.008478
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,132
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.991957
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,133
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.986268
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,134
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.06754
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,135
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.034865
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:17.677
|
1,136
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.06
|
RecipeC2
|
WaferB60
| 7
|
2023-01-01 03:41:22.677
|
1,137
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.915039
|
RecipeC2
|
WaferB60
| 7
|
2023-01-01 03:41:22.677
|
1,138
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 69.609375
|
RecipeC2
|
WaferB60
| 7
|
2023-01-01 03:41:22.677
|
1,139
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:24.678
|
1,140
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB60
| 8
|
2023-01-01 03:41:24.678
|
1,141
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.92793
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,142
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992924
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,143
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 673.209023
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,144
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,145
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.048947
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,146
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.062329
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,147
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.036612
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:20.702
|
1,148
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 671.04492
|
RecipeC2
|
WaferB61
| 9
|
2023-01-01 03:43:21.672
|
1,149
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.969238
|
RecipeC2
|
WaferB61
| 7
|
2023-01-01 03:43:26.672
|
1,150
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.79
|
RecipeC2
|
WaferB61
| 7
|
2023-01-01 03:43:26.672
|
1,151
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 30.585938
|
RecipeC2
|
WaferB61
| 7
|
2023-01-01 03:43:26.672
|
1,152
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:27.838
|
1,153
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC2
|
WaferB61
| 8
|
2023-01-01 03:43:27.838
|
1,154
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC2
|
WaferB61
| 9
|
2023-01-01 03:43:28.672
|
1,155
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.035031
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,156
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,157
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.035676
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,158
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 670.729844
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,159
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.068243
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,160
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,161
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992233
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:24.678
|
1,162
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.934082
|
RecipeC2
|
WaferB62
| 7
|
2023-01-01 03:45:29.677
|
1,163
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.06
|
RecipeC2
|
WaferB62
| 7
|
2023-01-01 03:45:29.677
|
1,164
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 54.316407
|
RecipeC2
|
WaferB62
| 7
|
2023-01-01 03:45:29.677
|
1,165
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.004394
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:31.737
|
1,166
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB62
| 8
|
2023-01-01 03:45:31.737
|
1,167
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.039775
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,168
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.994583
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,169
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.047838
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,170
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.92793
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,171
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.055591
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,172
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.910643
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,173
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 669.96702
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:29.853
|
1,174
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 671.04492
|
RecipeC2
|
WaferB63
| 9
|
2023-01-01 03:47:30.673
|
1,175
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 38.056641
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:47:35.673
|
1,176
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.941406
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:47:35.673
|
1,177
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.67
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:47:35.673
|
1,178
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.945801
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:36.673
|
1,179
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:47:36.673
|
1,180
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC2
|
WaferB63
| 9
|
2023-01-01 03:47:37.672
|
1,181
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992924
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,182
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 679.452578
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,183
|
lotA3
|
MFCNFlow_STEP_MEAN
| 0.021606
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,184
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.059211
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,185
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.065355
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,186
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.041151
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,187
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:48:59.739
|
1,188
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 678.95508
|
RecipeC2
|
WaferB63
| 9
|
2023-01-01 03:49:00.669
|
1,189
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.986816
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:49:05.679
|
1,190
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 4.65
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:49:05.679
|
1,191
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 30.234375
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:49:05.679
|
1,192
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:49:06.682
|
1,193
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:49:06.682
|
1,194
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.910643
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,195
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 682.628243
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,196
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.070633
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,197
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99251
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,198
|
lotA3
|
MFCNFlow_STEP_MEAN
| 0
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,199
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.023514
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
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