Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,000
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:17:39.671
|
1,001
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:17:40.671
|
1,002
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:17:40.671
|
1,003
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,004
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,005
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 679.344105
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,006
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.971475
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,007
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.053792
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,008
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.081088
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,009
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 12.000552
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,010
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.995839
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,011
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,012
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.029754
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,013
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC1
|
WaferB50
| 10
|
2023-01-01 03:19:10.680
|
1,014
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.940308
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:19:15.677
|
1,015
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:19:15.677
|
1,016
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 31.860352
|
RecipeC1
|
WaferB50
| 7
|
2023-01-01 03:19:15.677
|
1,017
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:19:17.677
|
1,018
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC1
|
WaferB50
| 8
|
2023-01-01 03:19:17.677
|
1,019
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.889035
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,020
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,021
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.081995
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,022
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.045689
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,023
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.037297
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,024
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99251
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,025
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 700.521448
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:49.674
|
1,026
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.969238
|
RecipeC2
|
WaferB51
| 7
|
2023-01-01 03:24:54.674
|
1,027
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 133.242187
|
RecipeC2
|
WaferB51
| 7
|
2023-01-01 03:24:54.674
|
1,028
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC2
|
WaferB51
| 7
|
2023-01-01 03:24:54.674
|
1,029
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:56.664
|
1,030
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.015381
|
RecipeC2
|
WaferB51
| 8
|
2023-01-01 03:24:56.664
|
1,031
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.994721
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,032
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 697.188241
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,033
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.039775
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,034
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,035
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.069824
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,036
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,037
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.049459
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:25.771
|
1,038
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 694.7754
|
RecipeC2
|
WaferB52
| 9
|
2023-01-01 03:27:26.679
|
1,039
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC2
|
WaferB52
| 7
|
2023-01-01 03:27:31.681
|
1,040
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 33.925781
|
RecipeC2
|
WaferB52
| 7
|
2023-01-01 03:27:31.681
|
1,041
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.929688
|
RecipeC2
|
WaferB52
| 7
|
2023-01-01 03:27:31.681
|
1,042
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:33.668
|
1,043
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC2
|
WaferB52
| 8
|
2023-01-01 03:27:33.668
|
1,044
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.069086
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,045
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.052105
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,046
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992924
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,047
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.047437
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,048
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 686.989602
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,049
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,050
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.921447
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:35.666
|
1,051
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC2
|
WaferB53
| 7
|
2023-01-01 03:28:41.665
|
1,052
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.987305
|
RecipeC2
|
WaferB53
| 7
|
2023-01-01 03:28:41.665
|
1,053
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 90.820312
|
RecipeC2
|
WaferB53
| 7
|
2023-01-01 03:28:41.665
|
1,054
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:42.666
|
1,055
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC2
|
WaferB53
| 8
|
2023-01-01 03:28:42.666
|
1,056
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.041251
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,057
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.075272
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,058
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 674.519088
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,059
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99251
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,060
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.041053
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,061
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.889035
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,062
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:29:54.673
|
1,063
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.994629
|
RecipeC2
|
WaferB54
| 7
|
2023-01-01 03:30:00.672
|
1,064
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.922
|
RecipeC2
|
WaferB54
| 7
|
2023-01-01 03:30:00.672
|
1,065
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 117.993163
|
RecipeC2
|
WaferB54
| 7
|
2023-01-01 03:30:00.672
|
1,066
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:30:01.673
|
1,067
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC2
|
WaferB54
| 8
|
2023-01-01 03:30:01.673
|
1,068
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.035833
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,069
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 670.862509
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,070
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.047437
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,071
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.979786
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,072
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.073726
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,073
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.867426
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,074
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.993063
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:17.680
|
1,075
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 66.064453
|
RecipeC2
|
WaferB55
| 7
|
2023-01-01 03:31:23.670
|
1,076
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.937256
|
RecipeC2
|
WaferB55
| 7
|
2023-01-01 03:31:23.670
|
1,077
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.898
|
RecipeC2
|
WaferB55
| 7
|
2023-01-01 03:31:23.670
|
1,078
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:24.670
|
1,079
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC2
|
WaferB55
| 8
|
2023-01-01 03:31:24.670
|
1,080
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.051081
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,081
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.039705
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,082
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.076818
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,083
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.993754
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,084
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 673.200729
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,085
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.889035
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,086
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:03.676
|
1,087
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.978027
|
RecipeC2
|
WaferB56
| 7
|
2023-01-01 03:33:09.675
|
1,088
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 23.115235
|
RecipeC2
|
WaferB56
| 7
|
2023-01-01 03:33:09.675
|
1,089
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.1975
|
RecipeC2
|
WaferB56
| 7
|
2023-01-01 03:33:09.675
|
1,090
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:10.675
|
1,091
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.394531
|
RecipeC2
|
WaferB56
| 8
|
2023-01-01 03:33:10.675
|
1,092
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.052703
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,093
|
lotA3
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,094
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99251
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,095
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.062329
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,096
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 669.96702
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,097
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.889035
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,098
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.04115
|
RecipeC2
|
WaferB57
| 8
|
2023-01-01 03:35:07.681
|
1,099
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 92.98828
|
RecipeC2
|
WaferB57
| 7
|
2023-01-01 03:35:12.671
|
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