Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
700
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0.002274
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
701
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.04912
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
702
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.998631
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
703
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.063848
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
704
|
lotA1
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
705
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:42:08.392
|
706
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 678.0762
|
RecipeC0
|
WaferB37
| 12
|
2023-01-01 02:42:09.395
|
707
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 51.240235
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:42:14.392
|
708
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:42:14.392
|
709
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.939941
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:42:14.392
|
710
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:42:15.402
|
711
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:42:15.402
|
712
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB37
| 9
|
2023-01-01 02:42:16.392
|
713
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
714
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
715
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.007324
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
716
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
717
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.001273
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
718
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 6.038852
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
719
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 668.746796
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
720
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.953856
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
721
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.078371
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
722
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
723
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.055338
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:43:41.388
|
724
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 681.15234
|
RecipeC0
|
WaferB37
| 1
|
2023-01-01 02:43:42.388
|
725
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 40.100098
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:43:46.503
|
726
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:43:46.503
|
727
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.94397
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:43:46.503
|
728
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.004394
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:43:48.388
|
729
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:43:48.388
|
730
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
731
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.996281
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
732
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0.002197
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
733
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
734
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
735
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.981129
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
736
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.046094
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
737
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 681.882401
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
738
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
739
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.994826
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
740
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.052145
|
RecipeC0
|
WaferB37
| 10
|
2023-01-01 02:45:13.385
|
741
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 52.207033
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:45:18.394
|
742
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.926758
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:45:18.394
|
743
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC0
|
WaferB37
| 7
|
2023-01-01 02:45:18.394
|
744
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:45:19.394
|
745
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.938476
|
RecipeC0
|
WaferB37
| 8
|
2023-01-01 02:45:19.394
|
746
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.99352
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
747
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
748
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99896
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
749
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.083986
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
750
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 691.578727
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
751
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.064745
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
752
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.068045
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
753
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.965645
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
754
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.932252
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
755
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.052246
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
756
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB38
| 10
|
2023-01-01 02:51:02.392
|
757
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 65.214843
|
RecipeC1
|
WaferB38
| 7
|
2023-01-01 02:51:07.393
|
758
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC1
|
WaferB38
| 7
|
2023-01-01 02:51:07.393
|
759
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.913574
|
RecipeC1
|
WaferB38
| 7
|
2023-01-01 02:51:07.393
|
760
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC1
|
WaferB38
| 8
|
2023-01-01 02:51:08.401
|
761
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB38
| 8
|
2023-01-01 02:51:08.401
|
762
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -2.197266
|
RecipeC1
|
WaferB39
| 8
|
2023-01-01 02:52:52.398
|
763
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC1
|
WaferB39
| 8
|
2023-01-01 02:52:52.398
|
764
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0.002274
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
765
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
766
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.010913
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
767
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.0592
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
768
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.044754
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
769
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
770
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 698.860143
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
771
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.042968
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
772
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
773
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.049153
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
774
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.999832
|
RecipeC1
|
WaferB39
| 10
|
2023-01-01 02:53:53.556
|
775
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 97.646486
|
RecipeC1
|
WaferB39
| 7
|
2023-01-01 02:53:58.385
|
776
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.928223
|
RecipeC1
|
WaferB39
| 7
|
2023-01-01 02:53:58.385
|
777
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 5.16
|
RecipeC1
|
WaferB39
| 7
|
2023-01-01 02:53:58.385
|
778
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC1
|
WaferB39
| 8
|
2023-01-01 02:54:00.415
|
779
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.993408
|
RecipeC1
|
WaferB39
| 8
|
2023-01-01 02:54:00.415
|
780
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 682.045422
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
781
|
lotA2
|
MFCEFlow_STEP_MEAN
| 81.079902
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
782
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.998842
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
783
|
lotA2
|
MFCJFlow_STEP_MEAN
| 60.052246
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
784
|
lotA2
|
MFCGFlow_STEP_MEAN
| 74.996281
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
785
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
786
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
787
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.03871
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
788
|
lotA2
|
MFC2Flow_STEP_MEAN
| 75.064745
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
789
|
lotA2
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
790
|
lotA2
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB40
| 10
|
2023-01-01 02:55:10.402
|
791
|
lotA2
|
ThrottleValveAngle_STEP_MEAN
| 6.03
|
RecipeC1
|
WaferB40
| 7
|
2023-01-01 02:55:15.392
|
792
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 50.009766
|
RecipeC1
|
WaferB40
| 7
|
2023-01-01 02:55:15.392
|
793
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.931152
|
RecipeC1
|
WaferB40
| 7
|
2023-01-01 02:55:15.392
|
794
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.923828
|
RecipeC1
|
WaferB40
| 8
|
2023-01-01 02:55:16.512
|
795
|
lotA2
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB40
| 8
|
2023-01-01 02:55:16.512
|
796
|
lotA2
|
UPC1-Flow_STEP_MEAN
| 3.076172
|
RecipeC1
|
WaferB41
| 9
|
2023-01-01 02:55:24.391
|
797
|
lotA2
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC1
|
WaferB41
| 10
|
2023-01-01 02:56:25.389
|
798
|
lotA2
|
Pressure100TorrManometer_STEP_MEAN
| 11.999352
|
RecipeC1
|
WaferB41
| 10
|
2023-01-01 02:56:25.389
|
799
|
lotA2
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB41
| 10
|
2023-01-01 02:56:25.389
|
Subsets and Splits
No community queries yet
The top public SQL queries from the community will appear here once available.