Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
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stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,200
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.041251
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:34.666
|
1,201
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 156.70899
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:50:39.675
|
1,202
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:50:39.675
|
1,203
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.992676
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:50:39.675
|
1,204
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 12.000733
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:41.675
|
1,205
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -4.174805
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:50:41.675
|
1,206
|
lotA3
|
MFCJFlow_STEP_MEAN
| 90.062901
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,207
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 6.056053
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,208
|
lotA3
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,209
|
lotA3
|
MFCKFlow_STEP_MEAN
| 90.041251
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,210
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 692.545574
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,211
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.994086
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,212
|
lotA3
|
MFCNFlow_STEP_MEAN
| 0
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:09.672
|
1,213
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 696.533205
|
RecipeC2
|
WaferB63
| 9
|
2023-01-01 03:52:11.675
|
1,214
|
lotA3
|
ThrottleValveAngle_STEP_MEAN
| 5.835
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:52:16.682
|
1,215
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.991211
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:52:16.682
|
1,216
|
lotA3
|
UPC1-Flow_STEP_MEAN
| 43.066405
|
RecipeC2
|
WaferB63
| 7
|
2023-01-01 03:52:16.682
|
1,217
|
lotA3
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:17.672
|
1,218
|
lotA3
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC2
|
WaferB63
| 8
|
2023-01-01 03:52:17.672
|
1,219
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0.004549
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,220
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,221
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.984355
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,222
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.016296
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,223
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 688.608641
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,224
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.052351
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,225
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.99647
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,226
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.967049
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,227
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,228
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,229
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC1
|
WaferB64
| 10
|
2023-01-01 06:08:56.058
|
1,230
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 698.73048
|
RecipeC1
|
WaferB64
| 1
|
2023-01-01 06:08:57.058
|
1,231
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 36.47461
|
RecipeC1
|
WaferB64
| 7
|
2023-01-01 06:09:01.048
|
1,232
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC1
|
WaferB64
| 7
|
2023-01-01 06:09:01.048
|
1,233
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.94397
|
RecipeC1
|
WaferB64
| 7
|
2023-01-01 06:09:01.048
|
1,234
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -2.197266
|
RecipeC1
|
WaferB64
| 8
|
2023-01-01 06:09:03.048
|
1,235
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC1
|
WaferB64
| 8
|
2023-01-01 06:09:03.048
|
1,236
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -0.878906
|
RecipeC1
|
WaferB65
| 9
|
2023-01-01 06:10:42.064
|
1,237
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,238
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 686.245677
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,239
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0.002274
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,240
|
lotA4
|
MFC2Flow_STEP_MEAN
| 74.98938
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,241
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,242
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,243
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.046026
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,244
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.923279
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,245
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.052351
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,246
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,247
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB65
| 10
|
2023-01-01 06:11:43.052
|
1,248
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 695.21484
|
RecipeC1
|
WaferB65
| 12
|
2023-01-01 06:11:44.052
|
1,249
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.920899
|
RecipeC1
|
WaferB65
| 7
|
2023-01-01 06:11:49.051
|
1,250
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 39.638672
|
RecipeC1
|
WaferB65
| 7
|
2023-01-01 06:11:49.051
|
1,251
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC1
|
WaferB65
| 7
|
2023-01-01 06:11:49.051
|
1,252
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC1
|
WaferB65
| 8
|
2023-01-01 06:11:50.051
|
1,253
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC1
|
WaferB65
| 8
|
2023-01-01 06:11:50.051
|
1,254
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 3.955078
|
RecipeC1
|
WaferB66
| 9
|
2023-01-01 06:11:58.051
|
1,255
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,256
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 679.740336
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,257
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,258
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.186768
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,259
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,260
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.052246
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,261
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,262
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.997551
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,263
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.992623
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,264
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,265
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.935338
|
RecipeC1
|
WaferB66
| 10
|
2023-01-01 06:12:59.139
|
1,266
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 41.132812
|
RecipeC1
|
WaferB66
| 7
|
2023-01-01 06:13:05.049
|
1,267
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.904785
|
RecipeC1
|
WaferB66
| 7
|
2023-01-01 06:13:05.049
|
1,268
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.88
|
RecipeC1
|
WaferB66
| 7
|
2023-01-01 06:13:05.049
|
1,269
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC1
|
WaferB66
| 8
|
2023-01-01 06:13:06.048
|
1,270
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC1
|
WaferB66
| 8
|
2023-01-01 06:13:06.048
|
1,271
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.995771
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,272
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,273
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,274
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,275
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.99076
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,276
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.078371
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,277
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,278
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,279
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.926935
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,280
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.056683
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,281
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 667.89787
|
RecipeC1
|
WaferB67
| 10
|
2023-01-01 06:14:15.056
|
1,282
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 38.671875
|
RecipeC1
|
WaferB67
| 7
|
2023-01-01 06:14:20.055
|
1,283
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB67
| 7
|
2023-01-01 06:14:20.055
|
1,284
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.912109
|
RecipeC1
|
WaferB67
| 7
|
2023-01-01 06:14:20.055
|
1,285
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC1
|
WaferB67
| 8
|
2023-01-01 06:14:21.056
|
1,286
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.953125
|
RecipeC1
|
WaferB67
| 8
|
2023-01-01 06:14:21.056
|
1,287
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.987226
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,288
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,289
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 661.232867
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,290
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,291
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.995629
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,292
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.138916
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,293
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,294
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.978852
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,295
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.053792
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,296
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,297
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB68
| 10
|
2023-01-01 06:15:35.073
|
1,298
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB68
| 7
|
2023-01-01 06:15:41.043
|
1,299
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 32.080078
|
RecipeC1
|
WaferB68
| 7
|
2023-01-01 06:15:41.043
|
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