Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,400
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB74
| 10
|
2023-01-01 06:27:29.064
|
1,401
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 671.48436
|
RecipeC1
|
WaferB74
| 12
|
2023-01-01 06:27:30.046
|
1,402
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 34.716797
|
RecipeC1
|
WaferB74
| 7
|
2023-01-01 06:27:35.045
|
1,403
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB74
| 7
|
2023-01-01 06:27:35.045
|
1,404
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.969238
|
RecipeC1
|
WaferB74
| 7
|
2023-01-01 06:27:35.045
|
1,405
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB74
| 8
|
2023-01-01 06:27:36.055
|
1,406
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC1
|
WaferB74
| 8
|
2023-01-01 06:27:36.055
|
1,407
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.990097
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,408
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0.00447
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,409
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.999231
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,410
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.03125
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,411
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.08174
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,412
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.042968
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,413
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.932252
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,414
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,415
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,416
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 660.044183
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,417
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 6.00541
|
RecipeC1
|
WaferB75
| 10
|
2023-01-01 06:29:31.051
|
1,418
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC1
|
WaferB75
| 7
|
2023-01-01 06:29:36.060
|
1,419
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 94.306639
|
RecipeC1
|
WaferB75
| 7
|
2023-01-01 06:29:36.060
|
1,420
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.925293
|
RecipeC1
|
WaferB75
| 7
|
2023-01-01 06:29:36.060
|
1,421
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC1
|
WaferB75
| 8
|
2023-01-01 06:29:38.050
|
1,422
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC1
|
WaferB75
| 8
|
2023-01-01 06:29:38.050
|
1,423
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.000142
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,424
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.978226
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,425
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,426
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.041422
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,427
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,428
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,429
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.985238
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,430
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,431
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.019287
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,432
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.065871
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,433
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 660.618538
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:31:36.055
|
1,434
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 63.720703
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:31:41.056
|
1,435
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.934082
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:31:41.056
|
1,436
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:31:41.056
|
1,437
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:31:43.126
|
1,438
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.004394
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:31:43.126
|
1,439
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.072755
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,440
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 667.356402
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,441
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,442
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.032446
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,443
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.990097
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,444
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,445
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.044582
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,446
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,447
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.932131
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,448
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.056683
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,449
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.998271
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:33:06.053
|
1,450
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.966309
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:33:11.052
|
1,451
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.9475
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:33:11.052
|
1,452
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 156.796875
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:33:11.052
|
1,453
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:33:13.052
|
1,454
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.011719
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:33:13.052
|
1,455
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:33:40.061
|
1,456
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 0.878906
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:33:40.061
|
1,457
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.924754
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,458
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,459
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.975465
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,460
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0.006823
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,461
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.049153
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,462
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,463
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,464
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 670.821593
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,465
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,466
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.999111
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,467
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.073776
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:34:41.048
|
1,468
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:34:46.049
|
1,469
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 87.187503
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:34:46.049
|
1,470
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.926758
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:34:46.049
|
1,471
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.004395
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:34:48.051
|
1,472
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:34:48.051
|
1,473
|
lotA4
|
MFCJFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,474
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.940492
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,475
|
lotA4
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,476
|
lotA4
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,477
|
lotA4
|
MFC2Flow_STEP_MEAN
| 75.007324
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,478
|
lotA4
|
MFC5Flow_STEP_MEAN
| 81.061524
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,479
|
lotA4
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,480
|
lotA4
|
MFCGFlow_STEP_MEAN
| 74.990097
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,481
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.998991
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,482
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 680.921815
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,483
|
lotA4
|
MFCEFlow_STEP_MEAN
| 81.075001
|
RecipeC1
|
WaferB76
| 10
|
2023-01-01 06:36:15.055
|
1,484
|
lotA4
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:36:20.045
|
1,485
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 11.961914
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:36:20.045
|
1,486
|
lotA4
|
UPC1-Flow_STEP_MEAN
| 142.910159
|
RecipeC1
|
WaferB76
| 7
|
2023-01-01 06:36:20.045
|
1,487
|
lotA4
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:36:22.045
|
1,488
|
lotA4
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC1
|
WaferB76
| 8
|
2023-01-01 06:36:22.045
|
1,489
|
lotA5
|
UPC1-Flow_STEP_MEAN
| 4.833984
|
RecipeC2
|
WaferB77
| 1
|
2023-01-01 08:38:10.057
|
1,490
|
lotA5
|
MFCNFlow_STEP_MEAN
| 134.975465
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,491
|
lotA5
|
MFCXFlow_STEP_MEAN
| 134.95386
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,492
|
lotA5
|
UPC1-Flow_STEP_MEAN
| 698.490015
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,493
|
lotA5
|
MFCKFlow_STEP_MEAN
| 90.039705
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,494
|
lotA5
|
Pressure100TorrManometer_STEP_MEAN
| 11.99251
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,495
|
lotA5
|
MFCJFlow_STEP_MEAN
| 90.062901
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,496
|
lotA5
|
ThrottleValveAngle_STEP_MEAN
| 6.008919
|
RecipeC2
|
WaferB77
| 8
|
2023-01-01 08:39:05.065
|
1,497
|
lotA5
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC2
|
WaferB77
| 7
|
2023-01-01 08:39:10.057
|
1,498
|
lotA5
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC2
|
WaferB77
| 7
|
2023-01-01 08:39:10.057
|
1,499
|
lotA5
|
UPC1-Flow_STEP_MEAN
| 59.941405
|
RecipeC2
|
WaferB77
| 7
|
2023-01-01 08:39:10.057
|
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