Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
500
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.99755
|
RecipeC0
|
WaferB26
| 10
|
2023-01-01 02:21:10.650
|
501
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB26
| 10
|
2023-01-01 02:21:10.650
|
502
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 687.564038
|
RecipeC0
|
WaferB26
| 10
|
2023-01-01 02:21:10.650
|
503
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.044444
|
RecipeC0
|
WaferB26
| 10
|
2023-01-01 02:21:10.650
|
504
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.961914
|
RecipeC0
|
WaferB26
| 7
|
2023-01-01 02:21:15.649
|
505
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB26
| 7
|
2023-01-01 02:21:15.649
|
506
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 132.363279
|
RecipeC0
|
WaferB26
| 7
|
2023-01-01 02:21:15.649
|
507
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.993408
|
RecipeC0
|
WaferB26
| 8
|
2023-01-01 02:21:17.652
|
508
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB26
| 8
|
2023-01-01 02:21:17.652
|
509
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC0
|
WaferB27
| 9
|
2023-01-01 02:21:25.659
|
510
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.019287
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
511
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
512
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.981484
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
513
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
514
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
515
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 677.629511
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
516
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.99659
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
517
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.049153
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
518
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
519
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 6.051148
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
520
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.073776
|
RecipeC0
|
WaferB27
| 10
|
2023-01-01 02:22:26.770
|
521
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.919434
|
RecipeC0
|
WaferB27
| 7
|
2023-01-01 02:22:32.648
|
522
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB27
| 7
|
2023-01-01 02:22:32.648
|
523
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 38.935547
|
RecipeC0
|
WaferB27
| 7
|
2023-01-01 02:22:32.648
|
524
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB27
| 8
|
2023-01-01 02:22:33.657
|
525
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC0
|
WaferB27
| 8
|
2023-01-01 02:22:33.657
|
526
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB28
| 8
|
2023-01-01 02:22:42.659
|
527
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC0
|
WaferB28
| 8
|
2023-01-01 02:22:42.659
|
528
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.075001
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
529
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.049119
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
530
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 6.074754
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
531
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.038531
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
532
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 662.983478
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
533
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.000432
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
534
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0.004549
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
535
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.043212
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
536
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
537
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
538
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB28
| 10
|
2023-01-01 02:23:43.643
|
539
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.934082
|
RecipeC0
|
WaferB28
| 7
|
2023-01-01 02:23:48.654
|
540
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 88.24219
|
RecipeC0
|
WaferB28
| 7
|
2023-01-01 02:23:48.654
|
541
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB28
| 7
|
2023-01-01 02:23:48.654
|
542
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB28
| 8
|
2023-01-01 02:23:50.654
|
543
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC0
|
WaferB28
| 8
|
2023-01-01 02:23:50.654
|
544
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.066016
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
545
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
546
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.934194
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
547
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.8057
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
548
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
549
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.999669
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
550
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.99076
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
551
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 664.233397
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
552
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.072755
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
553
|
lotA1
|
MFC2Flow_STEP_MEAN
| 74.995361
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
554
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB29
| 10
|
2023-01-01 02:25:01.651
|
555
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB29
| 7
|
2023-01-01 02:25:06.651
|
556
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.913574
|
RecipeC0
|
WaferB29
| 7
|
2023-01-01 02:25:06.651
|
557
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 72.070314
|
RecipeC0
|
WaferB29
| 7
|
2023-01-01 02:25:06.651
|
558
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC0
|
WaferB29
| 8
|
2023-01-01 02:25:08.680
|
559
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.993408
|
RecipeC0
|
WaferB29
| 8
|
2023-01-01 02:25:08.680
|
560
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC0
|
WaferB30
| 8
|
2023-01-01 02:25:41.649
|
561
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB30
| 8
|
2023-01-01 02:25:41.649
|
562
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
563
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.050632
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
564
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.960164
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
565
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
566
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
567
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.932252
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
568
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.992968
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
569
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.999592
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
570
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
571
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 663.855175
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
572
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.075001
|
RecipeC0
|
WaferB30
| 10
|
2023-01-01 02:26:42.657
|
573
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 85.693359
|
RecipeC0
|
WaferB30
| 7
|
2023-01-01 02:26:47.657
|
574
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC0
|
WaferB30
| 7
|
2023-01-01 02:26:47.657
|
575
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.932617
|
RecipeC0
|
WaferB30
| 7
|
2023-01-01 02:26:47.657
|
576
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.735352
|
RecipeC0
|
WaferB30
| 8
|
2023-01-01 02:26:49.647
|
577
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.993408
|
RecipeC0
|
WaferB30
| 8
|
2023-01-01 02:26:49.647
|
578
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.068263
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
579
|
lotA1
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
580
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0.002235
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
581
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
582
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 661.420181
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
583
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.056884
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
584
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.954754
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
585
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
586
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
587
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
588
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 12.001153
|
RecipeC0
|
WaferB31
| 10
|
2023-01-01 02:28:40.653
|
589
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC0
|
WaferB31
| 7
|
2023-01-01 02:28:45.642
|
590
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.95166
|
RecipeC0
|
WaferB31
| 7
|
2023-01-01 02:28:45.642
|
591
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 128.759765
|
RecipeC0
|
WaferB31
| 7
|
2023-01-01 02:28:45.642
|
592
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB31
| 8
|
2023-01-01 02:28:47.695
|
593
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.949463
|
RecipeC0
|
WaferB31
| 8
|
2023-01-01 02:28:47.695
|
594
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
|
RecipeC0
|
WaferB32
| 7
|
2023-01-01 02:29:39.670
|
595
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -1.318359
|
RecipeC0
|
WaferB32
| 7
|
2023-01-01 02:29:39.670
|
596
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.063698
|
RecipeC0
|
WaferB32
| 10
|
2023-01-01 02:30:40.658
|
597
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.019287
|
RecipeC0
|
WaferB32
| 10
|
2023-01-01 02:30:40.658
|
598
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC0
|
WaferB32
| 10
|
2023-01-01 02:30:40.658
|
599
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 6.017213
|
RecipeC0
|
WaferB32
| 10
|
2023-01-01 02:30:40.658
|
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