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400
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RecipeC0
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401
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lotA0
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RecipeC0
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402
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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2023-01-01 01:49:20.272
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
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WaferB23
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2023-01-01 01:49:20.272
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lotA0
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UPC1-Flow_STEP_MEAN
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lotA0
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2023-01-01 01:49:25.262
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lotA0
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2023-01-01 01:49:25.262
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lotA0
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lotA0
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lotA0
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RecipeC0
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2023-01-01 01:50:37.269
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411
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lotA0
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MFCGFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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412
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lotA0
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MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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413
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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414
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lotA0
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MFCNFlow_STEP_MEAN
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WaferB24
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2023-01-01 01:50:37.269
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415
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lotA0
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MFCEFlow_STEP_MEAN
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WaferB24
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2023-01-01 01:50:37.269
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416
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lotA0
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MFC5Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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417
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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418
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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419
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lotA0
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MFCKFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:37.269
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420
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:38.269
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421
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:43.269
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422
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:43.269
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423
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:43.269
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424
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:45.269
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425
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:50:45.269
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426
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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427
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lotA0
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MFC5Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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428
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lotA0
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MFCKFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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429
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lotA0
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MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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430
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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431
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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432
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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433
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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434
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lotA0
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MFCGFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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435
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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436
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:53.256
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437
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:58.269
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438
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:58.269
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439
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:51:58.269
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440
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:52:00.266
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441
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
| 8
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2023-01-01 01:52:00.266
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442
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lotA0
|
ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:53:08.263
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443
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lotA0
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MFCEFlow_STEP_MEAN
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RecipeC0
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WaferB24
| 10
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2023-01-01 01:53:08.263
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444
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lotA0
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MFCJFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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445
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lotA0
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MFCKFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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446
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lotA0
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MFCNFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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447
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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448
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lotA0
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MFCGFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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449
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lotA0
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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450
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lotA0
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MFC2Flow_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:08.263
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451
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lotA0
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MFC5Flow_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:08.263
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452
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lotA0
|
UPC1-Flow_STEP_MEAN
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RecipeC0
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WaferB24
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2023-01-01 01:53:08.263
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453
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lotA0
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UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:13.263
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454
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lotA0
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ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:13.263
|
455
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lotA0
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Pressure100TorrManometer_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:13.263
|
456
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lotA0
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Pressure100TorrManometer_STEP_MEAN
| 11.938476
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RecipeC0
|
WaferB24
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2023-01-01 01:53:14.273
|
457
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lotA0
|
UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB24
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2023-01-01 01:53:14.273
|
458
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lotA0
|
UPC1-Flow_STEP_MEAN
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RecipeC0
|
WaferB24
| 9
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2023-01-01 01:53:20.263
|
459
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lotA0
|
MFCKFlow_STEP_MEAN
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
460
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lotA0
|
MFCGFlow_STEP_MEAN
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
461
|
lotA0
|
MFCNFlow_STEP_MEAN
| 134.95386
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RecipeC0
|
WaferB24
| 10
|
2023-01-01 01:54:22.271
|
462
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lotA0
|
ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
463
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lotA0
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
464
|
lotA0
|
MFC5Flow_STEP_MEAN
| 81.075466
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
465
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.998271
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
466
|
lotA0
|
MFCJFlow_STEP_MEAN
| 60.053792
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
467
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lotA0
|
UPC1-Flow_STEP_MEAN
| 680.11495
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RecipeC0
|
WaferB24
| 10
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2023-01-01 01:54:22.271
|
468
|
lotA0
|
MFCEFlow_STEP_MEAN
| 81.06765
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RecipeC0
|
WaferB24
| 10
|
2023-01-01 01:54:22.271
|
469
|
lotA0
|
MFC2Flow_STEP_MEAN
| 75.126953
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RecipeC0
|
WaferB24
| 10
|
2023-01-01 01:54:22.271
|
470
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 692.57814
|
RecipeC0
|
WaferB24
| 1
|
2023-01-01 01:54:23.270
|
471
|
lotA0
|
UPC1-Flow_STEP_MEAN
| 35.925293
|
RecipeC0
|
WaferB24
| 7
|
2023-01-01 01:54:27.260
|
472
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.954956
|
RecipeC0
|
WaferB24
| 7
|
2023-01-01 01:54:27.260
|
473
|
lotA0
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB24
| 7
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2023-01-01 01:54:27.260
|
474
|
lotA0
|
UPC1-Flow_STEP_MEAN
| -3.955078
|
RecipeC0
|
WaferB24
| 8
|
2023-01-01 01:54:29.260
|
475
|
lotA0
|
Pressure100TorrManometer_STEP_MEAN
| 11.993408
|
RecipeC0
|
WaferB24
| 8
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2023-01-01 01:54:29.260
|
476
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 691.490305
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
477
|
lotA1
|
MFC5Flow_STEP_MEAN
| 81.066016
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
478
|
lotA1
|
MFCGFlow_STEP_MEAN
| 74.987226
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
479
|
lotA1
|
MFC2Flow_STEP_MEAN
| 75.043212
|
RecipeC0
|
WaferB25
| 10
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2023-01-01 02:18:20.648
|
480
|
lotA1
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
481
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.998031
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
482
|
lotA1
|
MFCJFlow_STEP_MEAN
| 60.052351
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
483
|
lotA1
|
MFCKFlow_STEP_MEAN
| 60.046026
|
RecipeC0
|
WaferB25
| 10
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2023-01-01 02:18:20.648
|
484
|
lotA1
|
MFCNFlow_STEP_MEAN
| 134.8983
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
485
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.962131
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
486
|
lotA1
|
MFCEFlow_STEP_MEAN
| 81.075001
|
RecipeC0
|
WaferB25
| 10
|
2023-01-01 02:18:20.648
|
487
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 698.29101
|
RecipeC0
|
WaferB25
| 12
|
2023-01-01 02:18:21.646
|
488
|
lotA1
|
UPC1-Flow_STEP_MEAN
| 37.96875
|
RecipeC0
|
WaferB25
| 7
|
2023-01-01 02:18:26.648
|
489
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.923828
|
RecipeC0
|
WaferB25
| 7
|
2023-01-01 02:18:26.648
|
490
|
lotA1
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC0
|
WaferB25
| 7
|
2023-01-01 02:18:26.648
|
491
|
lotA1
|
Pressure100TorrManometer_STEP_MEAN
| 11.989746
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RecipeC0
|
WaferB25
| 8
|
2023-01-01 02:18:27.646
|
492
|
lotA1
|
UPC1-Flow_STEP_MEAN
| -3.515625
|
RecipeC0
|
WaferB25
| 8
|
2023-01-01 02:18:27.646
|
493
|
lotA1
|
MFC2Flow_STEP_MEAN
| 74.98938
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RecipeC0
|
WaferB26
| 10
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2023-01-01 02:21:10.650
|
494
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lotA1
|
MFCJFlow_STEP_MEAN
| 60.049188
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RecipeC0
|
WaferB26
| 10
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2023-01-01 02:21:10.650
|
495
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lotA1
|
ThrottleValveAngle_STEP_MEAN
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RecipeC0
|
WaferB26
| 10
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2023-01-01 02:21:10.650
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496
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lotA1
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MFC5Flow_STEP_MEAN
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RecipeC0
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WaferB26
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2023-01-01 02:21:10.650
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497
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lotA1
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MFCXFlow_STEP_MEAN
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RecipeC0
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WaferB26
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2023-01-01 02:21:10.650
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498
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lotA1
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MFCNFlow_STEP_MEAN
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RecipeC0
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WaferB26
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2023-01-01 02:21:10.650
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499
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lotA1
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MFCGFlow_STEP_MEAN
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RecipeC0
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WaferB26
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2023-01-01 02:21:10.650
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