Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,600
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.998511
|
RecipeC3
|
WaferB82
| 10
|
2023-01-01 09:07:46.459
|
1,601
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.073776
|
RecipeC3
|
WaferB82
| 10
|
2023-01-01 09:07:46.459
|
1,602
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.041556
|
RecipeC3
|
WaferB82
| 10
|
2023-01-01 09:07:46.459
|
1,603
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 705.8986
|
RecipeC3
|
WaferB82
| 10
|
2023-01-01 09:07:46.459
|
1,604
|
lotA6
|
MFCGFlow_STEP_MEAN
| 74.99871
|
RecipeC3
|
WaferB82
| 10
|
2023-01-01 09:07:46.459
|
1,605
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 55.898437
|
RecipeC3
|
WaferB82
| 7
|
2023-01-01 09:07:51.462
|
1,606
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.979492
|
RecipeC3
|
WaferB82
| 7
|
2023-01-01 09:07:51.462
|
1,607
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC3
|
WaferB82
| 7
|
2023-01-01 09:07:51.462
|
1,608
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC3
|
WaferB82
| 8
|
2023-01-01 09:07:52.459
|
1,609
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -2.636719
|
RecipeC3
|
WaferB82
| 8
|
2023-01-01 09:07:52.459
|
1,610
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -2.197266
|
RecipeC3
|
WaferB82
| 9
|
2023-01-01 09:07:58.459
|
1,611
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 3.955078
|
RecipeC3
|
WaferB83
| 8
|
2023-01-01 09:08:00.471
|
1,612
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC3
|
WaferB83
| 8
|
2023-01-01 09:08:00.471
|
1,613
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 695.97128
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,614
|
lotA6
|
MFCNFlow_STEP_MEAN
| 134.953856
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,615
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.98623
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,616
|
lotA6
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,617
|
lotA6
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,618
|
lotA6
|
MFC2Flow_STEP_MEAN
| 75.043213
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,619
|
lotA6
|
MFC5Flow_STEP_MEAN
| 81.068263
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,620
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,621
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.999111
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,622
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,623
|
lotA6
|
MFCGFlow_STEP_MEAN
| 74.99871
|
RecipeC3
|
WaferB83
| 10
|
2023-01-01 09:09:01.457
|
1,624
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC3
|
WaferB83
| 7
|
2023-01-01 09:09:06.457
|
1,625
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 108.63281
|
RecipeC3
|
WaferB83
| 7
|
2023-01-01 09:09:06.457
|
1,626
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.991211
|
RecipeC3
|
WaferB83
| 7
|
2023-01-01 09:09:06.457
|
1,627
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -2.856445
|
RecipeC3
|
WaferB83
| 8
|
2023-01-01 09:09:08.467
|
1,628
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 12.000733
|
RecipeC3
|
WaferB83
| 8
|
2023-01-01 09:09:08.467
|
1,629
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.973443
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,630
|
lotA6
|
MFCNFlow_STEP_MEAN
| 134.975465
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,631
|
lotA6
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,632
|
lotA6
|
MFC2Flow_STEP_MEAN
| 75.016296
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,633
|
lotA6
|
MFC5Flow_STEP_MEAN
| 81.065871
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,634
|
lotA6
|
MFCGFlow_STEP_MEAN
| 74.995839
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,635
|
lotA6
|
MFCJFlow_STEP_MEAN
| 60.050699
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,636
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.054786
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,637
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 675.756435
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,638
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.044514
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,639
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 12.000792
|
RecipeC3
|
WaferB84
| 10
|
2023-01-01 09:10:16.494
|
1,640
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 684.22851
|
RecipeC3
|
WaferB84
| 1
|
2023-01-01 09:10:17.454
|
1,641
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.97
|
RecipeC3
|
WaferB84
| 7
|
2023-01-01 09:10:22.464
|
1,642
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 29.091797
|
RecipeC3
|
WaferB84
| 7
|
2023-01-01 09:10:22.464
|
1,643
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.991211
|
RecipeC3
|
WaferB84
| 7
|
2023-01-01 09:10:22.464
|
1,644
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.982422
|
RecipeC3
|
WaferB84
| 8
|
2023-01-01 09:10:23.474
|
1,645
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -3.076172
|
RecipeC3
|
WaferB84
| 8
|
2023-01-01 09:10:23.474
|
1,646
|
lotA6
|
MFCGFlow_STEP_MEAN
| 74.99352
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,647
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.06765
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,648
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 664.729555
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,649
|
lotA6
|
MFC2Flow_STEP_MEAN
| 75.193945
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,650
|
lotA6
|
MFC5Flow_STEP_MEAN
| 81.066171
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,651
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.998015
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,652
|
lotA6
|
MFCXFlow_STEP_MEAN
| 0.006705
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,653
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.047607
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,654
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,655
|
lotA6
|
MFCJFlow_STEP_MEAN
| 60.052145
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,656
|
lotA6
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC3
|
WaferB85
| 10
|
2023-01-01 09:11:32.461
|
1,657
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 73.828125
|
RecipeC3
|
WaferB85
| 7
|
2023-01-01 09:11:37.461
|
1,658
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.991211
|
RecipeC3
|
WaferB85
| 7
|
2023-01-01 09:11:37.461
|
1,659
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.91
|
RecipeC3
|
WaferB85
| 7
|
2023-01-01 09:11:37.461
|
1,660
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC3
|
WaferB85
| 8
|
2023-01-01 09:11:39.461
|
1,661
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 12.000733
|
RecipeC3
|
WaferB85
| 8
|
2023-01-01 09:11:39.461
|
1,662
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC3
|
WaferB86
| 8
|
2023-01-01 09:11:49.463
|
1,663
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.99707
|
RecipeC3
|
WaferB86
| 8
|
2023-01-01 09:11:49.463
|
1,664
|
lotA6
|
MFCJFlow_STEP_MEAN
| 60.057095
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,665
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.93459
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,666
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 662.37833
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,667
|
lotA6
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,668
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.041281
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,669
|
lotA6
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,670
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.079902
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,671
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.998151
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,672
|
lotA6
|
MFC2Flow_STEP_MEAN
| 75.043212
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,673
|
lotA6
|
MFC5Flow_STEP_MEAN
| 81.06377
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,674
|
lotA6
|
MFCGFlow_STEP_MEAN
| 75.001581
|
RecipeC3
|
WaferB86
| 10
|
2023-01-01 09:12:50.458
|
1,675
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.964844
|
RecipeC3
|
WaferB86
| 7
|
2023-01-01 09:12:55.468
|
1,676
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 80.156251
|
RecipeC3
|
WaferB86
| 7
|
2023-01-01 09:12:55.468
|
1,677
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.94
|
RecipeC3
|
WaferB86
| 7
|
2023-01-01 09:12:55.468
|
1,678
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC3
|
WaferB86
| 8
|
2023-01-01 09:12:57.458
|
1,679
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 12.015381
|
RecipeC3
|
WaferB86
| 8
|
2023-01-01 09:12:57.458
|
1,680
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC3
|
WaferB87
| 9
|
2023-01-01 09:13:07.458
|
1,681
|
lotA6
|
MFCEFlow_STEP_MEAN
| 81.068263
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,682
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.999472
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,683
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 662.20543
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,684
|
lotA6
|
MFC5Flow_STEP_MEAN
| 81.065871
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,685
|
lotA6
|
MFCJFlow_STEP_MEAN
| 60.053792
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,686
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.046061
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,687
|
lotA6
|
MFCNFlow_STEP_MEAN
| 134.95386
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,688
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.941967
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,689
|
lotA6
|
MFCGFlow_STEP_MEAN
| 74.995839
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,690
|
lotA6
|
MFCXFlow_STEP_MEAN
| 0
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,691
|
lotA6
|
MFC2Flow_STEP_MEAN
| 75.016296
|
RecipeC3
|
WaferB87
| 10
|
2023-01-01 09:14:08.465
|
1,692
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 11.975098
|
RecipeC3
|
WaferB87
| 7
|
2023-01-01 09:14:13.465
|
1,693
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 83.408202
|
RecipeC3
|
WaferB87
| 7
|
2023-01-01 09:14:13.465
|
1,694
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 6
|
RecipeC3
|
WaferB87
| 7
|
2023-01-01 09:14:13.465
|
1,695
|
lotA6
|
Pressure100TorrManometer_STEP_MEAN
| 12.008057
|
RecipeC3
|
WaferB87
| 8
|
2023-01-01 09:14:15.465
|
1,696
|
lotA6
|
UPC1-Flow_STEP_MEAN
| -3.295898
|
RecipeC3
|
WaferB87
| 8
|
2023-01-01 09:14:15.465
|
1,697
|
lotA6
|
UPC1-Flow_STEP_MEAN
| 3.515625
|
RecipeC3
|
WaferB88
| 9
|
2023-01-01 09:14:25.465
|
1,698
|
lotA6
|
MFCKFlow_STEP_MEAN
| 60.04912
|
RecipeC3
|
WaferB88
| 10
|
2023-01-01 09:15:26.462
|
1,699
|
lotA6
|
ThrottleValveAngle_STEP_MEAN
| 5.946393
|
RecipeC3
|
WaferB88
| 10
|
2023-01-01 09:15:26.462
|
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